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Public Domain Picture: 394 037 001

Courtesy: US Department of Energy
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394 037 001
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394 037 001
AT OAK RIDGE NATIONAL LABORATORY, THE INTEGRATED SILICON PILLAR ARRAY IS COMPOSED OF 18 MICRON TALL 800 MM WIDE PILLARS IN A HEXAGONAL ARRANGEMENT. The interstitial spaces between pillars form a perfectly ordered network of nanofludic channels with widths from below 100 to 900nm. The exact channel width is tailored by overcoating pillars with highly conformal layer using plasma enhanced chemical vapor deposition (PECVD) or atomic layer deposition (ALD). The bifurcating (tree-like) system of channels is up to 250 micron wide and provides an interface between the network of nanopores and the macroscopic experimental environment. This image was originally produced in black and white and was colorized afterward. For more information or additional images, please contact 202-586-5251.
Date Added:
June 6, 2014
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Produced by United States Government
The file available on this page is a work of the United States government. A work of the United States government, as defined by United States copyright law, is "a work prepared by an officer or employee of the U.S. government as part of that person's official duties." In general, under section 105 of the Copyright Act, such works are not entitled to domestic copyright protection under U.S. law.
US Department of Energy

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US Department of Energy (Flickr Photostream)
External Site: US Department of Energy
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